Figure 1 show the principle of XRF, An inner shell electron is excited by an incident photon in the X-ray region. During the De-excitation process, an electron is moving from a higher energy level to fill the vacancy created by ab ejection. the energy difference between the two shells appears as an X-ray emitted by the atom. the energy of the peaks lead to the identification of the elements present in the sample (qualitative analysis), while the peak intensity provides the relevant or absolute elemental concentration (semi quantitative/quantitative analysis).
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